Semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics

Reexamination Certificate

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C257S347000, C257SE29287

Reexamination Certificate

active

10887839

ABSTRACT:
A transistor region is a region where a plurality of MOS transistors, including an MOS transistor, are formed, and a dummy region is a region lying under a spiral inductor. In the dummy region, a plurality of dummy active layers are disposed in the main surface of an SOI substrate and a plurality of dummy gate electrodes are disposed covering the respective dummy active layers. The arrangement pattern of the dummy active layers and the arrangement pattern of the dummy gate electrodes nearly match, so that the dummy gate electrodes are aligned accurately on the dummy active layers.

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Y. Hirano, et al. “Bulk-Layout-Compatible μm SOl-CMOS Technology Using Using Boldy-Fixed Partial Trench Isolation (PTI)” 1999 IEEE Intenational SOL Conference, pp. pp. 131-132.
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