Method for making dynamic random access memory cell capacitor

Details Method for making dynamic random access memory cell capacitor Method for making dynamic random access memory cell capacitor

1995-05-15

1996-06-04

Ledynh, Bot L.

Electric heating

Metal heating

By arc

437 60, 437919, 29 2542, B23K 900, H01L 2170, H01G 700

Patent

active

055235425

ABSTRACT:
A random access memory (RAM) cell capacitor and its method of fabrication. A bottom electrode plate of the capacitor is provided with a plurality of islands disposed on the surface thereof so as to attain an increase in the capacitance thereof.

REFERENCES:
patent: 5231044 (1993-07-01), Jun
patent: 5429980 (1995-07-01), Yang et al.

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