Piezoelectric element, ink jet head, angular velocity...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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Details

Other Related Categories

C257S347000, C252S06290R, C252S06290R, C501S134000

Type

Reexamination Certificate

Status

active

Patent number

11097924

Description

ABSTRACT:
In a piezoelectric element, a cubic or tetragonal orientation control layer (15) is provided on a first electrode layer (14), and formed on the orientation control layer (15) is a piezoelectric layer (16) having a rhombohedral or tetragonal crystalline structure and made of lead zirconate titanate to which a Pb-containing complex perovskite compound expressed by the chemical formula Pb(AaBb)O3has been added in an amount that is from 1 mol % to 50 mol %. The piezoelectric layer (16) is formed so that the crystal grains thereof become columnar grains which extend in the thickness direction of the piezoelectric layer (16) and in which the ratio of the average cross-sectional diameter to the length is from 1/50 to 1/14.

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patent: 2005/0127795 (2005-06-01), Torii et al.
patent: 2005/0146772 (2005-07-01), Murata et al.
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patent: 3021930 (2000-01-01), None
patent: 2000-252544 (2000-09-01), None
patent: 2001-088294 (2001-04-01), None
Ryoichi Takayama et al.; “Preparation of epitaxial Pb(ZrxTi1-x)O3thin fims and their crystallographic, pyroelectric, and ferroelectric properties”; Journal of Applied Physics, vol. 65, No. 4; pp. 1666-1670; Feb. 1989.
Kouji Sumi et al.; “Structure and Piezoelectric Properties of 0.9Pb(Zr,Ti)O3-0.1Pb(Mg, Nb) O3Films Prepared by Metalorganic Deposition Process”; Japanese Journal of Applied Physics; vol. 38, No. 2A, pp. 886-889; Feb. 1999.
P Muralt et al.; “Texture control of PbTiO3and Pb(Zr, Ti)O3thin films with TiO2seeding”; Journal of Applied Physics vol. 83, No. 7; pp. 3835-3841; Apr. 1998.

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