Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2007-12-04
2007-12-04
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
11456810
ABSTRACT:
A method for measuring high frequency force of interaction between a tip of a cantilever and a sample includes providing a cantilever having a cantilever arm and a probe tip formed on a free end of the cantilever arm where the cantilever arm has a first shape and an axis of torsion associated with the first shape and the probe tip is positioned in an offset displacement from the axis of torsion, vibrating the cantilever at or near the fundamental flexural resonance frequency with a predetermined oscillation amplitude, bringing the cantilever to the vicinity of the sample, tapping the surface of the sample repeatedly using the probe tip, and detecting changes in the amplitude or the phase of a high frequency vibration harmonic of the cantilever as the cantilever is deflected in response to features on the surface of the sample.
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International Search Report, 12 pages.
Quate Calvin F.
Sahin Ozgur
Solgaard Olav
Cook Carmen C.
Larkin Daniel S.
Patent Law Group LLP
The Board of Trustees of the Leland Stanford Junior University
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