Polishing cloth and method of manufacturing semiconductor...

Details Polishing cloth and method of manufacturing semiconductor... Polishing cloth and method of manufacturing semiconductor...

2007-11-06

2007-11-06

Goudreau, George A. (Department: 1763)

Abrasive tool making process, material, or composition

With synthetic resin

C451S526000

Reexamination Certificate

active

10994229

ABSTRACT:
A polishing cloth used in the chemical mechanical polishing treatment comprises a molded body of (meth)acrylic copolymer having an acid value of 10 to 100 mg KOH/g and a hydroxyl group value of 50 to 150 mg KOH/g.

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