Method of making integrated circuit interconnection

Details Method of making integrated circuit interconnection Method of making integrated circuit interconnection

1991-05-14

1992-08-25

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437190, 437192, 437197, 437198, 437194, 437245, 437246, H01L 21465

Patent

active

051418975

ABSTRACT:
An integrated circuit and method of fabrication are disclosed. The invention provides an etch-stop layer between a plug formed in a via and an overlying runner. The etch stop layer serves a variety of functions, including protecting the plug during the etching process which defines the runner.

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