Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-08-14
2007-08-14
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
10961391
ABSTRACT:
To enable high acceleration and high moving speed of a pattern support or a substrate table of a lithographic apparatus, one of the pattern support and the substrate table is supported by an actuator for relatively large displacements, whereas an actuator for accurately positioning is omitted. The other one of the pattern support and the substrate table is supported by an actuator assembly including an actuator for accurate positioning and an actuator for relatively large displacements. An alignment accuracy of a patterning device and a substrate is achieved by providing a control system that is adapted to position the other one of the pattern support and the substrate table such that a positioning error of the one of the pattern support and the substrate table is compensated by the positioning of the other one.
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European Search Report issued in EP 05 07 7329 dated Jan. 17, 2006.
Butler Hans
Cox Henrikus Herman Marie
De Vos Youssef Karel Maria
Kunst Ronald Casper
Van Der Schoot Harmen Klaas
ASML Netherlands B.V.
Gutierrez Kevin
Perkey W. B.
Pillsbury Winthrop Shaw & Pittman LLP
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