Methods and systems for determining optical properties using...

Details Methods and systems for determining optical properties using... Methods and systems for determining optical properties using...

2007-12-04

2007-12-04

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S484000, C356S511000

Reexamination Certificate

active

11604668

ABSTRACT:
Methods and related systems for determining properties of optical systems (e.g., interferometers) and/or optical elements (e.g., lenses and/or lens systems) are described. For example, information related to an optical thickness mismatch of an interferometer can be determined by providing scanning interferometry data. The data typically include obtaining one or more interference signals each corresponding to a different spatial location of a test object. A phase is determined for each of multiple frequencies of each interference signal. The information related to the optical thickness mismatch is determined based on the phase for each of the multiple frequencies of the interference signal(s).

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