Method of fabricating light-emitting device and apparatus...

Details Method of fabricating light-emitting device and apparatus... Method of fabricating light-emitting device and apparatus...

2007-12-18

2007-12-18

Williams, Joseph (Department: 2879)

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

Reexamination Certificate

active

10410538

ABSTRACT:
In this embodiment, an interval distance between a desposition source holder17and an object on which deposition is performed (substrate13) is reduced to 30 cm or less, preferably 20 cm or less, more preferably 5 to 15 cm, and a deposition source holder17is moved in an X direction or a Y direction in accordance with an insulator (also called a bank or a barrier) in deposition, and a shutter15is opened or closed to form a film. The present invention can cope with an increase in size of a deposition apparatus with a further increase in size of a substrate in the future.

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