Electronic device having infrared sensing elements

Details Electronic device having infrared sensing elements Electronic device having infrared sensing elements

2007-12-18

2007-12-18

Porta, Dave (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

C257S682000, C257SE23137, C438S476000

Reexamination Certificate

active

11348357

ABSTRACT:
An electronic device according to the present invention includes: a cavity, which is surrounded with a cavity wall portion and which has a reduced pressure; a gettering thin film, which is arranged in the cavity and has the function of adsorbing a surrounding substance; and an activating portion, at least a part of which is arranged in the cavity and which has the function of activating the gettering thin film by generating heat.

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Machine Assisted Translation of Foreign Reference: JP 2003-017672.
Hong et al., “Silicon metal-oxide-semiconductor field effect transistor/field emission array fabricated using chemical mechanical polishing”, J. Vac. Sci. Technol. B 21(1), Jan./Feb. 2003, pp. 500-505.
Kruse et al., “Uncooled Infrared Imaging Arrays and Systems” Academic Press, Oct. 8, 1997, pp. 114-115.

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