Replica micro-resonator and method of fabrication

Optical waveguides – With optical coupler – Input/output coupler

Reexamination Certificate

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C385S014000, C385S015000, C385S129000

Reexamination Certificate

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10953288

ABSTRACT:
Polymer micro-resonators and methods of fabricating the same. A liquid polymer material is applied to a micro-resonator master that includes at least one micro-resonator, such as a disk or toroid micro-resonator. The liquid molding material is cured or set to form a mold that is derived from the master. A replica of the master micro-resonator is cast using the mold, and the replicated micro-toroid resonator(s) are separated from the mold. The polymer micro-resonators can have Q factors up to about 5×106. The mold and replica materials can be a silicone material, such as polydimethylsiloxane.

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