Susceptor for heating semiconductor substrates

Details Susceptor for heating semiconductor substrates Susceptor for heating semiconductor substrates

1980-08-22

1982-03-30

Smith, John D.

Electric heating

Metal heating

Of cylinders

219 1067, 118500, 118725, 118730, H05B 508, B05C 1300

Patent

active

043225926

ABSTRACT:
An integral graphite susceptor of the barrel type comprising a hollow polyhedron arranged to support one or more semiconductor substrates on its outer planar wall surfaces. The substrates are supported in a novel column and row array in which each wafer is mounted on a wall surface portion that is related to the other adjacent wall surface portions in an equilateral triangular configuration to provide an efficient substrate support susceptor. Wafer edges extending beyond corners of the susceptor cause a disturbance in the gas flow resulting in more uniform deposition of epitaxial material.

REFERENCES:
patent: 3424629 (1969-01-01), Ernst et al.
patent: 3460510 (1969-08-01), Currin
patent: 3603284 (1971-09-01), Garnache
patent: 3719166 (1973-03-01), Gereth
patent: 3749058 (1973-07-01), Slabaugh
patent: 3892940 (1975-07-01), Bloem et al.
patent: 3980854 (1976-09-01), Berkman et al.
patent: 4099041 (1978-07-01), Berkman et al.

Affiliated with

Also associated with

Rating

Susceptor for heating semiconductor substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Susceptor for heating semiconductor substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Susceptor for heating semiconductor substrates will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-383906