Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Chemically responsive
Reexamination Certificate
2007-12-25
2007-12-25
Sines, Brian (Department: 1743)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Chemically responsive
C438S021000, C438S048000, C422S050000, C422S068100, C422S082010, C422S082030, C422S083000, C422S098000, C436S043000, C436S149000, C977S700000, C977S701000, C977S840000, C977S882000, C977S883000, C977S902000, C977S920000, C977S953000, C977S957000, C029S592000, C029S592100
Reexamination Certificate
active
10099664
ABSTRACT:
An electronic system for selectively detecting and identifying a plurality of chemical species, which comprises an array of nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the nanostructure sensing devices. Methods for fabricating the electronic system are also disclosed. The methods involve modifying nanostructures within the devices to have different selectivity for sensing chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the arrays of nanostructure sensing devices to detect and identify a plurality of chemical species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest with signals from nanostructure sensing devices that have been exposed to the chemical species of interest.
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Bradley Keith
Collins Philip G.
Gabriel Jean-Christophe P.
Gruner George
Beyer & Weaver, LLP
Nanomix Inc.
Sines Brian
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