Method and apparatus for controlling iso-dense bias in...

Details Method and apparatus for controlling iso-dense bias in... Method and apparatus for controlling iso-dense bias in...

2007-08-14

2007-08-14

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S077000, C430S030000

Reexamination Certificate

active

11046902

ABSTRACT:
The present invention relates to a lithographic apparatus and a method of using the apparatus in the manufacture of a device such as an integrated circuit (IC). In particular, the present invention relates to a lithographic apparatus wherein iso-dense bias in a printed pattern on a substrate is capable of being controlled by using radiation with a spectral distribution comprising two or more spectral peaks.

REFERENCES:
patent: 5303002 (1994-04-01), Yan
patent: 5978394 (1999-11-01), Newman et al.
patent: 6348357 (2002-02-01), Sano
patent: 6853653 (2005-02-01), Spangler et al.
patent: 2001/0026448 (2001-10-01), Koizumi et al.
patent: 2002/0048288 (2002-04-01), Kroyan et al.
patent: 2004/0057033 (2004-03-01), McCullough et al.
patent: 2005/0078292 (2005-04-01), Bruebach

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