Illumination optical system and exposure apparatus having...

Details Illumination optical system and exposure apparatus having... Illumination optical system and exposure apparatus having...

2007-11-06

2007-11-06

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C362S268000

Reexamination Certificate

active

10984826

ABSTRACT:
An illumination optical system for Koehler-illuminating a target surface with light from a light source includes a light integrator for forming a secondary light source, the light integrator including plural elements formed directly onto a substrate; a condenser for condensing the light from the light integrator; and a shield for shielding the light that goes straight in interfaces among the plural elements from an effective illumination area on the illuminated surface.

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English language Patent Abstract for JP 2003-232901.
DIALOG English language Abstract for 01-286478.
DIALOG English language Abstract for 2002-222757.
DIALOG English language Abstract for 2003-232901.

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