Method and apparatus for scheduling pilot lots

Details Method and apparatus for scheduling pilot lots Method and apparatus for scheduling pilot lots

2007-08-14

2007-08-14

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S101000

Reexamination Certificate

active

11616710

ABSTRACT:
A method includes identifying a queue of workpiece lots awaiting processing in a process tool. At least one of the workpiece lots is associated with an obsolete control thread for controlling the process tool. Each of the plurality of workpiece lots is modeled as a parent lot and a child lot. A completion time for the workpiece lots is optimized by selecting a processing order of the workpiece lots and designating one of the child lots associated with the obsolete control thread as a pilot lot. A first workpiece lot in the selected processing order is processed in the process tool.

REFERENCES:
patent: 6148239 (2000-11-01), Funk et al.
patent: 6248602 (2001-06-01), Bode et al.
patent: 6427093 (2002-07-01), Toprac
patent: 7181354 (2007-02-01), Bone et al.
patent: 7200459 (2007-04-01), Bode et al.
patent: 2007/0078556 (2007-04-01), Stirton et al.

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