Electrical resistors – With base extending along resistance element – Resistance element coated on base
Reexamination Certificate
2007-02-13
2007-02-13
Hoang, Tu (Department: 2832)
Electrical resistors
With base extending along resistance element
Resistance element coated on base
C338S202000, C338S322000
Reexamination Certificate
active
10953478
ABSTRACT:
A resistor formed on a material layer of a semiconductor integrated circuit and a method for forming the resistor. The resistor comprises a region of resistive material with a plurality of conductive contacts or plugs in electrical contact with and extending away from the resistive material. A first and a second interconnect line are formed overlying the plugs and in conductive contact with one or more of the plurality of plugs, such that a portion of the resistive material between the first and the second interconnect lines provides a desired resistance. According to a method of the present invention, the plurality of conductive contacts are formed using a first photolithographic mask and the first and the second interconnect lines are formed using a second photolithographic mask. The desired resistance is changed by modifying the first or the second mask such that one or more dimensions of a region of the resistive material between the first and the second interconnect lines is altered.
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European Search Report, Dated Dec. 23, 2005.
Albers Bradley J.
Chen Alan Sangone
Kerr Daniel Charles
Key Roger W.
Russell William A.
Agere Systems Inc
Hoang Tu
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