Micromechanical structure, device including the structure,...

Details Micromechanical structure, device including the structure,... Micromechanical structure, device including the structure,...

2007-02-20

2007-02-20

Huynh, Andy (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

C257S215000, C257S415000

Reexamination Certificate

active

10934840

ABSTRACT:
A micromechanical structure and device and methods of forming and using the structure and device are disclosed. The structure includes an ion conductor and a plurality of electrodes. Mechanical properties of the structure are altered by applying a bias across the electrodes. Such structures can be used to form device such as actuators and air-gap devices.

REFERENCES:
patent: 5761115 (1998-06-01), Kozicki et al.
patent: 6635914 (2003-10-01), Kozicki et al.
patent: 6900498 (2005-05-01), Stauf et al.

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