Surface acoustic wave device from eutectic deposit

Details Surface acoustic wave device from eutectic deposit Surface acoustic wave device from eutectic deposit

1983-09-12

1985-07-02

Wong, Peter S.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

427100, 430945, H03H 925

Patent

active

045270821

ABSTRACT:
A method for the fabrication of surface acoustic wave devices by the selective removal of one of the phases of a metallic eutectic, solidified as a thin film having a lamellar morphology, forms a first spaced array of metallic elements. Removal is by line-heater or laser beam. This then provides a self-aligned structure for the formation of a second array of metallic elements interdigitated with the elements of the first array.

REFERENCES:
patent: 4414243 (1983-11-01), Cline
patent: 4450374 (1984-05-01), Cho et al.

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