Piezoelectric actuator and liquid jet head

Details Piezoelectric actuator and liquid jet head Piezoelectric actuator and liquid jet head

2007-10-09

2007-10-09

Budd, Mark (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S331000, C310S358000

Reexamination Certificate

active

10492355

ABSTRACT:
A piezoelectric actuator comprising an optimum layer structure when (100) orientation strontium ruthenate is used as a bottom electrode is provided. This piezoelectric actuator comprises a diaphragm30that is constituted by (100) orientation yttria-stabilized zirconia, CeO2, or ZrO2, that is grown epitaxially on a (100) orientation Si substrate20, a buffer layer41formed on the diaphragm and constituted by (001) orientation REBa2Cu3Ox, a bottom electrode42formed on the buffer layer and constituted by (100) orientation strontium ruthenate, a piezoelectric layer43formed on the bottom electrode and constituted by (100) orientation PZT, and a top electrode44formed on the piezoelectric layer.

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