Microelectromechanical device with reset electrode

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S291000, C359S292000, C359S295000, C359S298000, C359S223100, C359S224200

Reexamination Certificate

active

11448489

ABSTRACT:
A microelectromechanical device having a reset electrode for use in various devices including display devices such as those employing spatial light modulators. The device includes an optically transmissive substrate, a semiconductor substrate, and a member deflectable between a rest position and an operative position supported by one of the substrates. The deflectable member returns to an undeflected position by operation of the reset electrode.

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Wikipedia.org (Internet Website) definition for “Dielectrophoresis.”

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