Pressure sensor

Details Pressure sensor Pressure sensor

2007-10-30

2007-10-30

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S754000

Reexamination Certificate

active

11444302

ABSTRACT:
A pressure sensor for detecting a pressure and for outputting a signal based on the piezoresistance effect includes a substrate having a sensor chip on one side in a thin portion and a concave portion on another side, a piezo-resistor in the sensor chip, a pedestal being attached to the substrate and having a through hole for introducing the pressure to the sensor chip and a gel material filled in the concave portion and the through hole for protecting the sensor chip. A ratio of a diameter of the through hole to a thickness of the pedestal is substantially within a range between 1 and 3.

REFERENCES:
patent: 6085596 (2000-07-01), Jensen et al.
patent: 6218717 (2001-04-01), Toyoda et al.
patent: 6651508 (2003-11-01), Baba et al.
patent: 6755084 (2004-06-01), Tsukada et al.
patent: 6933582 (2005-08-01), Ishio et al.
patent: 7197939 (2007-04-01), Sakai et al.
patent: 2005/0000292 (2005-01-01), Muchow et al.
patent: A-H4-370726 (1992-12-01), None
patent: A-H5-133827 (1993-05-01), None
patent: A-H11-201845 (1999-07-01), None

Affiliated with

Also associated with

Rating

Pressure sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pressure sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pressure sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3829042