Projection optical system, exposure apparatus, and device...

Details Projection optical system, exposure apparatus, and device... Projection optical system, exposure apparatus, and device...

2007-10-16

2007-10-16

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S859000

Reexamination Certificate

active

11353005

ABSTRACT:
A projection optical system has at least eight reflecting mirrors and is relatively compact in the radial direction. The eight reflecting mirrors (M1˜M8) form a reduced image of a first surface on a second surface. A first reflecting image forming optical system (G1) forms a first intermediate image (IMI1) of the first surface based on light from the first surface, a second reflecting image forming optical system (G2) forms a second intermediate image (IMI2) of the first surface based on light from the first intermediate image, and a third reflecting image forming optical system (G3) forms a reduced image on the second surface based on light from the second intermediate image. The number of reflecting mirrors (M6˜M8) of the third reflecting image forming optical system is greater than the number of reflecting mirrors (M1, M2) of the first reflecting image forming optical system.

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