Semiconductor device manufacturing: process – Having organic semiconductive component
Reexamination Certificate
2007-11-13
2007-11-13
Dang, Phuc T. (Department: 2818)
Semiconductor device manufacturing: process
Having organic semiconductive component
C438S787000
Reexamination Certificate
active
11078211
ABSTRACT:
Supercritical fluid-assisted deposition of materials on substrates, such as semiconductor substrates for integrated circuit device manufacture. The deposition is effected using a supercritical fluid-based composition containing the precursor(s) of the material to be deposited on the substrate surface. Such approach permits use of precursors that otherwise would be wholly unsuitable for deposition applications, as lacking requisite volatility and transport characteristics for vapor phase deposition processes.
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Baum Thomas H.
Xu Chongying
Advanced Technology & Materials Inc.
Chappuis Maggie
Dang Phuc T.
Fuierer Tristan A.
Moore & Van Allen PLLC
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