Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2007-05-08
2007-05-08
Epps, Georgia (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C250S559400, C250S216000, C356S450000
Reexamination Certificate
active
11167807
ABSTRACT:
A resonator method and system for distinguishing characteristics of surface features or contaminants provides improved inspection or surface feature detection capability in scanning optical systems. A resonator including a surface of interest in the resonant path is coupled to a detector that detects light leaving the resonator. Changes in the resonance peak positions and peak intensities are evaluated against known changes for standard scatters in order to determine the material characteristics of an artifact at the surface of interest that causes a resonance change. The lateral size of the artifact is determined by de-convolving a known illumination spot size with the changing resonance characteristics, and the standard scatterer data is selected in conformity with the determined artifact size. The differential analysis using resonance peak shifts corresponding to phase and amplitude information provides an identification algorithm that identifies at least one artifact/material type is identified from matching known behaviors of artifacts/materials.
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Brunfeld Andrei
Clark Bryan
Toker Gregory
Epps Georgia
Harris Andrew M.
Lee Patrick J.
Mitch Harris Atty at Law, LLC
Xyratex Technology Limited
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