Positioning apparatus, exposure apparatus, and device...

Details Positioning apparatus, exposure apparatus, and device... Positioning apparatus, exposure apparatus, and device...

2007-10-30

2007-10-30

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C356S401000

Reexamination Certificate

active

11127154

ABSTRACT:
A positioning apparatus including first and second bases, and two moving elements which are guided by the first and second bases to move on the first and second bases. The two moving elements are supported on the first and second bases by air bearings. A distance is ensured between the first and second bases, and when the two moving elements move between the first and second bases, both a guide surface of the first base and a guide surface of the second bases are used. Also, pneumatic pressures of the air bearings are increased to be higher than that in a case in which the moving elements move on the first and second bases.

REFERENCES:
patent: 6262796 (2001-07-01), Loopstra et al.
patent: 2001-203140 (2001-07-01), None

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