Camera head for fast reproduction of a vacuum UV...

Details Camera head for fast reproduction of a vacuum UV... Camera head for fast reproduction of a vacuum UV...

2007-11-13

2007-11-13

Hannaher, Constantine (Department: 2884)

Radiant energy

Luminophor irradiation

Reexamination Certificate

active

10492003

ABSTRACT:
An apparatus for measuring the transport time of impurity particles in a plasma includes a spectrometer, a system for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as a display screen that presents the integrated charge as a series of spectral lines. The integrator circuit is assembled from discrete components. Thus, the transport of plasma impurities can be properly measured.

REFERENCES:
patent: 3447249 (1969-06-01), Greger
patent: 4465370 (1984-08-01), Yuasa et al.
patent: 5565982 (1996-10-01), Lee et al.
patent: 0 355 174 (1993-02-01), None
R. J. Fonck, A. T. Ramsey, and R. V. Yelle, “Multichannel grazing-incidence spectrometer for plasma impurity diagnosis: SPRED,” Applied Optics, vol. 21, No. 12, pp. 2115-2123 (Jun. 1982).
R. J. Fonck et al, “Multichannel grazing-incidence spectrometer . . . ” Applied Optics, vol. 21, No. 12 pp. 2115-2123 (Jun. 1982).

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