Utilizing an integrated plasmon detector to measure a metal...

Details Utilizing an integrated plasmon detector to measure a metal... Utilizing an integrated plasmon detector to measure a metal...

2007-11-20

2007-11-20

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S397000, C250S399000, C356S445000, C356S451000, C345S087000, C345S077000

Reexamination Certificate

active

11205782

ABSTRACT:
A method for monitoring the surface roughness of a metal, comprises impinging a laser beam onto the surface of a metal layer to induce the formation of a plasmon therein, and monitoring a current of decay electrons emitted by the plasmon.

REFERENCES:
patent: 4482779 (1984-11-01), Anderson
patent: 5451980 (1995-09-01), Simon et al.
patent: 2006/0170926 (2006-08-01), Wei et al.
Ditlbacher, H., et al., “Efficiency of local light-plasmon coupling”,Applied Physics letters, AIP, American Institute of Physics, vol. 83, No. 18, p. 3665 lefthand column, paragraph 3, p. 3667. lefthand column, paragraph 1, figures 1,3.
Jasperson, S.N., et al., “Photon-surface-plasmon coupling in thick Ag foils”,Physical Review USA, vol. 188, No. 2, pp. 759-770 (Dec. 1969).

Affiliated with

Also associated with

Rating

Utilizing an integrated plasmon detector to measure a metal... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Utilizing an integrated plasmon detector to measure a metal..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Utilizing an integrated plasmon detector to measure a metal... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3822215