Piezoelectric actuator and micro-electromechanical device

Details Piezoelectric actuator and micro-electromechanical device Piezoelectric actuator and micro-electromechanical device

2007-05-08

2007-05-08

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S366000, C977S837000

Reexamination Certificate

active

11196596

ABSTRACT:
A piezoelectric actuator includes a first beam including a first bottom electrode, a first piezoelectric film on the first bottom electrode, and a first top electrode on the first piezoelectric film, a fixed end assigned at an end of the first beam and fixed on a substrate, a connecting end assigned at another end of the first beam and suspended over a free space; and a second beam including a second piezoelectric film connected to the first piezoelectric film at the connecting end, a second bottom electrode under the second piezoelectric film, and a second top electrode on the second piezoelectric film, a working end assigned at an end of the second beam opposite to another end to which the connecting end is assigned and suspended over the free space; wherein a distance between centers of the fixed end and the working end is shorter than a distance from the working end to the connecting end.

REFERENCES:
patent: 5606452 (1997-02-01), Min
patent: 6018212 (2000-01-01), Kikuchi et al.
patent: 7157831 (2007-01-01), Allaei
patent: 2005/0099236 (2005-05-01), Kawakubo et al.
patent: 2006/0290236 (2006-12-01), Ikehashi
patent: 58-200616 (1983-11-01), None
patent: 2-129514 (1990-05-01), None
patent: 6-117862 (1994-04-01), None
patent: 2003-181800 (2003-07-01), None
U.S. Appl. No. 11/054,404, filed Feb. 10, 2005, Takashi Kawakubo, et al.
U.S. Appl. No. 11/115,107, filed Apr. 27, 2005, Takashi Kawakubo, et al.
U.S. Appl. No. 11/196,596, filed Aug. 4, 2005, Kawakubo et al.
U.s. Appl. No. 11/229,694, filed Sep. 20, 2005, Kawakubo et al.

Affiliated with

Also associated with

Rating

Piezoelectric actuator and micro-electromechanical device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric actuator and micro-electromechanical device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric actuator and micro-electromechanical device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3820729