Test pattern of semiconductor device and test method using...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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11028784

ABSTRACT:
There are provided a test pattern of a semiconductor device and a test method using the same. The test pattern of the semiconductor device includes a conductive pattern disposed on a semiconductor substrate, and the conductive pattern includes a plurality of line regions, which are aligned in parallel, and spaced at a uniform interval, and a plurality of connecting regions for connecting the plurality of line regions in a zigzag shape. The test pattern includes a plurality of transistors electrically switching first ends of the adjacent line regions corresponding to the connecting region, and each transistor includes a source region, which is electrically connected to one end of one of the adjacent line regions, and a drain region, which is electrically connected to one end of the other one of the adjacent line regions. Further, a transistor selecting part is electrically connected to gates of the plurality of transistors, for selecting one of the plurality of transistors or a combination thereof.

REFERENCES:
patent: 5485095 (1996-01-01), Bertsch et al.
patent: 5561367 (1996-10-01), Goettling et al.
patent: 5834795 (1998-11-01), Lee
patent: 5877631 (1999-03-01), Takahashi
patent: 6509739 (2003-01-01), Voogel et al.
patent: 6960785 (2005-11-01), Jin et al.
patent: 2003/0102474 (2003-06-01), Wang
patent: 02-56291 (2002-07-01), None

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