Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-02-13
2007-02-13
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
10829880
ABSTRACT:
A method and device for determining the topography of a thin film having a front surface and a back surface. The method comprises: irradiating the film with an incident coherent or partially coherent light beam so as to get two reflected beams, the first reflected beam being reflected from the front surface of the film, and the second beam being reflected from the back surface of the film; creating an interferometric image from a united beam comprising the two reflected beams and a reference beam, the reference beam originating from the incident beam, and made to be substantially parallel to the two reflected beams. The reference beam acquires a phase shift. The interferometric image is created the interference between a combined beam comprising the reference beam and the second reflected beam, and the first reflected beam, thus acquiring information on the topography of the film, that cannot be acquired using the two reflected beams alone.
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Leizerson Ilya
Lipson Stephen G.
Dippert William H.
Lyons Michael A.
Technion Research and Development Foundation Ltd.
Toatley , Jr. Gregory J.
Wolf Block Schorr & Solis-Cohen LLP
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