Lithographic apparatus and device manufacturing method...

Details Lithographic apparatus and device manufacturing method... Lithographic apparatus and device manufacturing method...

2007-07-31

2007-07-31

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S067000

Reexamination Certificate

active

11185024

ABSTRACT:
A continuous source of radiation, for example a lamp, is used in conjunction with pixel grid imaging. In one example, the individually controllable elements operate at a frequency of at least about 50 kHz. To compensate for any distortion of an exposed spot a point spread function is adjusted to be shorter in a scanning direction.

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