Optimizing light path uniformity in inspection systems

Details Optimizing light path uniformity in inspection systems Optimizing light path uniformity in inspection systems

2007-07-24

2007-07-24

Nguyen, Sang H. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

C356S394000

Reexamination Certificate

active

11067191

ABSTRACT:
An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination source in response to an analysis of the image of the sample point to determine illumination uniformity of the inspection system.

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