Structure having light modulating film and light control...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S251000, C359S252000, C359S254000, C359S255000, C359S256000, C359S263000, C359S315000, C359S318000, C359S320000, C359S323000, C345S055000, C345S084000, C345S206000, C345S214000, C345S098000, C345S099000, C345S103000

Reexamination Certificate

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11346833

ABSTRACT:
A structure includes a substrate and a light modulating film formed on top of the substrate. The light modulating film is made of polycrystalline PLZT containing Pb, Zr, Ti, and La as constituent elements. The film has a La concentration in the range of 5 at % to 30 at %. The relative dielectric constant at a frequency of 1 MHz is higher than or equal to 1200.

REFERENCES:
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patent: 2001-337303 (2001-07-01), None
patent: 2001-356309 (2001-12-01), None
patent: 2002-297008 (2002-10-01), None
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Hong-Jin Zhao, et al.; “Preparation and properties of PLZT thick films on silicon”; Materials Science and Engineering B99 (2003) 195-198.
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European Search Report for Application No. 04 771 379.7-2205 mailed Nov. 20, 2006.
Zhao H-J et al. “Preparation and properties of PLZT thick film on silicon”, Materials Science and Engineering B, Elsevier Sequoia, Lausanne, Ch, vol. 99, No. 1-3, May 25, 2003, pp. 195-198, XP004433341.
Es-Souni M et al. “Microstructure and properties of sol-gel processed Pb1-x Lax(Zr0.52, Ti0.48)1-x/4 O3 thin films. The effects of lanthanum content and bottom electrodes”, Thin Solid Films, Elsevier-Sequoia S.A. Lausanne, Ch, vol. 389, No. 1-2, Jun. 15, 2001, pp. 99-107, XP004242317.

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