Manufacturing process developing method for semiconductor...

Details Manufacturing process developing method for semiconductor... Manufacturing process developing method for semiconductor...

2007-06-26

2007-06-26

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S100000, C700S103000, C700S121000

Reexamination Certificate

active

10921150

ABSTRACT:
Before a process design stage of judging whether a process flow involves any problems, items and standards of a process PAC, which is a PAC of a process necessary for development of a manufacturing process, and of an element PAC, which is a PAC of an element technology used in the process are set, while linking the process PAC and the element PAC with each other.

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