Process and apparatus for formation of photovoltaic compounds

Details Process and apparatus for formation of photovoltaic compounds Process and apparatus for formation of photovoltaic compounds

1983-10-19

1985-07-02

Smith, John D.

Coating processes

Electrical product produced

Photoelectric

156611, 156DIG72, 156DIG103, 427 85, 427 87, H01L 2922

Patent

active

045268096

ABSTRACT:
The invention relates to a process and apparatus for formation and deposition of thin films on a substrate, in a vacuum, by evaporation of the elements to form a Zn.sub.x Cd.sub.1-x S compound having a preselected fixed ratio of cadmium to zinc, characterized by the evaporation of cadmium and zinc at a rate the ratio of which is proportional to the stoichiometric ratio of those elements in the intended compound and evaporation of sulfur at a rate at least twice the combined rates of cadmium and zinc, and at least twice that required by the stoichiometry of the intended compound.

REFERENCES:
patent: 3531335 (1970-09-01), Heyerdahl et al.
patent: 4239553 (1980-12-01), Barnett et al.
patent: 4267398 (1981-12-01), Rothwarf
patent: 4325986 (1982-04-01), Baron et al.
Gambino et al., "Evaporation Source for the Co-Deposition of Materials with Different Vapor Pressures", IBM TDB 14, Jun. 1, 1971.
Anderson, et al., Final Report SAN-1459-5 U.S. Department of Energy, EG-77-C-03-1459, Lockheed Corp., (1978), pp. 2-11.
Romeo, et al., Applied Phys. Letters, 32, (1978), p. 809.
Faurie, et al., J. Crystal Growth 54, (1981), p. 583.
Smith, et al., J. Applied Phys. 46, No. 6 (1975), p. 2369.

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