Particle beam apparatus

Details Particle beam apparatus Particle beam apparatus

2007-05-01

2007-05-01

Vanore, David A. (Department: 2881)

Radiant energy

Fluent material containment, support or transfer means

With irradiating source or radiating fluent material

C250S311000

Reexamination Certificate

active

10948225

ABSTRACT:
A particle beam apparatus has a cooled anti-contaminator (18) and/or a cooled specimen holder (17). A thermal conductor (19) is provided for providing a connection between the anti-contaminator (18) and/or the specimen holder (17), on the one hand, and the cooler (21) of a cryogen vessel (20) on the other hand. The thermal conductor (19) includes a carbon fiber bundle. With the carbon fiber bundle (19a,19b), a high thermal conductivity is ensured between the cooler (21) and the surface (17, 18) to be cooled. At the same time, thermal expansions are avoided which lead to a displacement of the anti-contaminator (18) and/or the specimen holder (17).

REFERENCES:
patent: 4179605 (1979-12-01), Watanabe et al.
patent: 4591722 (1986-05-01), Biddlecombe et al.
patent: 4833330 (1989-05-01), Swann et al.
patent: 5013913 (1991-05-01), Benner
patent: 5077637 (1991-12-01), Martorana et al.
patent: 6447964 (2002-09-01), Okino et al.
patent: 6469381 (2002-10-01), Houle et al.
patent: 2004/0094710 (2004-05-01), Muller et al.

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