Image sensor, an image sensor pixel, and methods of forming...

Details Image sensor, an image sensor pixel, and methods of forming... Image sensor, an image sensor pixel, and methods of forming...

2007-05-29

2007-05-29

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S208100, C250S214100

Reexamination Certificate

active

10725494

ABSTRACT:
A semiconductor image sensor utilizing a metal mesh filter to transmit light of a specific wavelength to a photoconversion device, and method of making said image sensor. Semiconductor image sensor pixel cells using varied metal mesh filters may be arranged in a Bayer pattern for color imaging. As a result, the need for using conventional polymer color filters in image sensor applications is eliminated.

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Schmidt, D.J., et al., “Color Filtering Metallization For Optoelectronic 100nm CMOS Circuits”, International Electron Devices Meeting 2003, IEDM, Technical Digest, Washington, DC, Dec. 8-10, 2003, New York, NY: IEEE, US, Dec. 8, 2003, pp. 389-392.
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