Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-04-10
2007-04-10
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S075000, C355S077000
Reexamination Certificate
active
11033130
ABSTRACT:
An exposure method for manufacturing a liquid crystal display utilizes a scanning exposure apparatus to expose a pattern of a mask onto a glass plate. The exposure method includes a step of moving a mask stage that holds the mask in a scanning direction by a first electromagnetic actuator. The first electromagnetic actuator moves the mask stage associating with a guide member that extends in the scanning direction. The method also includes the step of moving the mask stage in a non-scanning direction different from the scanning direction by a second electromagnetic actuator. The second electromagnetic actuator moves the mask stage associating with no guide member, and a moving distance in the non-scanning direction by the second electromagnetic actuator is shorter than a moving distance in the scanning direction by the first electromagnetic actuator.
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Kim Peter B.
Nikon Corporation
Oliff & Berridg,e PLC
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