Surface inspection apparatus and surface inspection method

Details Surface inspection apparatus and surface inspection method Surface inspection apparatus and surface inspection method

2007-11-20

2007-11-20

Stafira, Michael P. (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237200

Reexamination Certificate

active

11410944

ABSTRACT:
A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

REFERENCES:
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5777744 (1998-07-01), Yoshii et al.
patent: 5835220 (1998-11-01), Kazama et al.
patent: 6594012 (2003-07-01), Takeuchi et al.
patent: 2001/0010363 (2001-08-01), Watanabe et al.
patent: 2001/0013935 (2001-08-01), Watanabe et al.
patent: 2001/0026365 (2001-10-01), Hirosawa
patent: A 1-117024 (1989-05-01), None
patent: A 2-12002 (1990-01-01), None
patent: A 6-3278 (1994-01-01), None
patent: A 10-232122 (1998-09-01), None
patent: A 11-295231 (1999-10-01), None
patent: A 2002-116011 (2002-04-01), None

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