Non-contact surface configuration measuring apparatus and...

Optics: measuring and testing – Shape or surface configuration

Reexamination Certificate

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C356S608000, C356S609000, C356S622000

Reexamination Certificate

active

11033133

ABSTRACT:
A non-contact surface configuration measuring method is provided which allows for accurate measurement of a surface which is at a steep angle to a laser probe. Specific areas including parts inclined ±30° or more from an optimum measurement state relative to the laser probe are measured after a workpiece is rotated such that the surface within the specific areas is less than ±30°. Therefore, accurately measured data on the specific areas can be obtained even in a different coordinate system from that of a general area.

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EPO Search Report mailed on May 4, 2005.
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H. J. Tiziani, et al., “Dual-wavelength heterodyne differential interferometer for high-precision measurements of reflective aspherical surfaces and step heights”, Applied Optics, Optical Society of America, Washington, U.S., vol. 35, No. 19, Jul. 1, 1996, pp. 3525-3533, XP000620093, ISSN: 0003-6935.
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