RF-MEMS switch and its fabrication method

Details RF-MEMS switch and its fabrication method RF-MEMS switch and its fabrication method

2007-07-10

2007-07-10

Lee, K. (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

10902573

ABSTRACT:
The MEMS switch comprises a first anchor formed over a substrate, a first spring connected to the first anchor, an upper electrode which is connected to the first spring and makes a motion above the substrate, elastically deforming the first spring, a lower electrode formed over the substrate, positioned under the upper electrode, a second spring connected to the upper electrode, and a second anchor connected to the second spring. When voltage is applied between the upper and lower electrodes and the upper electrode makes a downward motion, the second anchor is brought into contact with the substrate. As a result, the second spring is elastically deformed. When the upper electrode is subsequently brought into contact with the lower electrode, thereby the upper and lower electrodes are electrically connected. The first and second anchors, first and second springs, and upper electrode are formed of identical metal in integral structure.

REFERENCES:
patent: 5578976 (1996-11-01), Yao
patent: 6115231 (2000-09-01), Shirakawa
patent: 6646215 (2003-11-01), Nelson
patent: 6714105 (2004-03-01), Eliacin et al.
patent: 6876283 (2005-04-01), Weber et al.
patent: 7053736 (2006-05-01), Nelson
patent: 2002/0055260 (2002-05-01), Chow et al.
patent: 2002/0149071 (2002-10-01), Shim
patent: 09-017300 (1997-01-01), None
patent: 10-068896 (1998-03-01), None
patent: 2002-326197 (2002-11-01), None

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