Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2007-07-31
2007-07-31
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S072000
Reexamination Certificate
active
10998180
ABSTRACT:
The invention relates to a substrate table arranged to support a substrate provided with at least one substrate mark. The at least one substrate mark having a position that can be measured using an alignment system. The substrate table is provided with an optical system having a magnification factor deviating from 1, for providing an image of the at least one alignment mark to be measured by the alignment system.
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Partial European Search Report issued in EP 05 11 0761, May 26, 2006.
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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