Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-01-09

2007-01-09

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S070000

Reexamination Certificate

active

10895999

ABSTRACT:
In one embodiment, a pulse-to-pulse dose reproducibility of a radiation system for use in maskless lithography is improved by providing a plurality of lasers and combining the radiation beams produced by each to form a single projection beam of radiation.

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European Search Report for Application No. 03254630.1-1226, dated Jun. 24, 2004.

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