Measuring and adjustment device for an alignment optical...

Details Measuring and adjustment device for an alignment optical... Measuring and adjustment device for an alignment optical...

2007-07-31

2007-07-31

Epps, Georgia (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S201100, C250S227110, C250S227200, C250S234000, C362S285000, C385S015000, C385S052000, C385S901000

Reexamination Certificate

active

11326434

ABSTRACT:
Avoiding an illumination light irregularity to the utmost under increasing degree of integration and the memory capacity by suppressing a light amount irregularity on the illumination pupil plane to the utmost, unable to be adjusted by a conventional method. When the light amount irregularity on the illumination pupil plane which is the exit surface of the optical fiber is relatively large, focus of the imaging surface of the CCD camera is switched from the sample to the illumination pupil plane by a focus switching lens. The light amount irregularity is calculated and analyzed by the image processor. Based on the analyzed result, the exit surface position of the optical fiber is adjusted in the illumination optical system. In this manner, the illumination pupil plane which is the exit surface of the optical fiber can be adjusted to an illumination pupil plane where the light amount irregularity is small.

REFERENCES:
patent: 5797674 (1998-08-01), Nagayama
patent: 6663560 (2003-12-01), MacAulay et al.
patent: 2004/0130777 (2004-07-01), Islam
patent: A 2001-317913 (2001-11-01), None

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