Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2007-09-25
2007-09-25
Lavarias, Arnel (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S368000, C359S586000, C359S588000
Reexamination Certificate
active
10475653
ABSTRACT:
An inspection microscope for several wavelength ranges with at least one illuminating beam path and at least one imaging beam path. Those optical elements in the illuminating beam path and in the imaging beam path, through which beams of all wavelengths pass, are provided with a reflection-reducing layer, by means of which the wavelength ranges with reduced reflection are the visible VIS-wavelength range up to 650 nm, the i-lines at λ=365 nm and the ultraviolet DUV-wavelength range from 240 nm to 270 nm. The reflection-reducing layer is a sandwich structure, comprising various material combinations, such as for example, M2/MgF2or M2/MgF2/SiO2or M2/MgF2/Al2O3, where M2 is a mixed substance from the company Merck, comprising Al2O3. The optical components with reduced reflectance preferably comprise quartz glass or CaF2.
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Lavarias Arnel
Leica Microsystems CMS GmbH
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