Micromirror and micromirror device

Details Micromirror and micromirror device Micromirror and micromirror device

2007-09-18

2007-09-18

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C359S298000, C359S290000, C359S291000, C345S085000, C345S108000

Reexamination Certificate

active

11616433

ABSTRACT:
There is provided a micromirror, which is provided with a reflection mirror, a first pair of torsion bars formed to protrude from the reflection mirror, a first supporting frame that supports the reflection mirror such that the reflection mirror is torsionally rotatable about a first rotation axis via the first pair of torsion bars, a second pair of torsion bars formed to protrude from the first supporting frame in a direction substantially perpendicular to a direction in which the first pair of torsion bars are extended, and a second supporting frame that supports the first supporting frame such that the first supporting frame is torsionally rotatable about a second rotation axis substantially perpendicular to the first rotation axis via the second pair of torsion bars. In this configuration, each of the second pair of torsion bars includes two separate conductive members.

REFERENCES:
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patent: 2004/0262507 (2004-12-01), Kikuchi et al.
patent: 2006/0033389 (2006-02-01), Esashi et al.
U.S. Appl. No. 11/616,328 to Esashi et al., filed on Dec. 27, 2006.

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