Support jig for thin circular objects

Details Support jig for thin circular objects Support jig for thin circular objects

1997-06-02

1998-08-11

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

134147, 134153, 134201, 134902, 211 4118, B08B 304

Patent

active

057913579

ABSTRACT:
A support jig for thin circular objects comprises two round rods, in each of which depressions, each having a substantially V-shaped cross section, are formed along the circumference of the round rod and perpendicularly to the center axis of the round rod and arranged along the center axis of the round rod. Thin circular objects are inserted into respective depressions formed in the round rods, so that the thin circular objects are supported by the support jig. A cut is formed in each of a plurality of side wall portions which define depressions such that the cut is symmetrical with respect to the perpendicular which connects the center of each of the supported thin circular objects and the center axis of each of the round bars. The support jig can stably retain thin circular objects, particularly wafers, upright so that their upper portions do not vibrate, and can reduce the areas subjected to surface tension.

REFERENCES:
patent: 2555594 (1951-06-01), Markovitz
patent: 3923156 (1975-12-01), Wallestad et al.
patent: 4669612 (1987-06-01), Mortensen
IBM Techanicla Disclosure Bulletin vol. 8 No. 2, May 1966.

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