Surface inspection method and surface inspection apparatus

Details Surface inspection method and surface inspection apparatus Surface inspection method and surface inspection apparatus

2007-07-17

2007-07-17

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

C356S237300, C356S237400

Reexamination Certificate

active

10864062

ABSTRACT:
A surface inspection apparatus includes an LD (10for emitting a laser beam (L0), an irradiation optical system for entering the emitted laser beam (L0) onto an inspection surface (210) of a wafer at predetermined depression angle (α), a scanning device (30) to displace the wafer (200) in order for the laser beam (L0) scans the inspection surface (210) in a spiral, an light intensity detecting device (50) to detect light intensity, and a scattered light detecting optical system (40) for guiding scattered light (L2) emitted from an irradiation area (220) in which the laser beam (L0) is entered. The light intensity detecting device (50) includes a multianode PMT (51) for detecting the light intensity by decomposing the scattered light (L2) into 10 channels (ch) in a one-dimensional direction (Y axis direction).

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