Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-01-09
2007-01-09
Wilkins, III, Harry D. (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S269000, C204S272000, C204S237000, C204SDIG012, C204S212000, C204S22400M, C205S082000, C205S096000, C205S292000
Reexamination Certificate
active
09866463
ABSTRACT:
A facility for selecting and refining electrical parameters for processing a microelectronic workpiece in a processing chamber is described. The facility initially configures the electrical parameters in accordance with either a mathematical model of the processing chamber or experimental data derived from operating the actual processing chamber. After a workpiece is processed with the initial parameter configuration, the results are measured and a sensitivity matrix based upon the mathematical model of the processing chamber is used to select new parameters that correct for any deficiencies measured in the processing of the first workpiece. These parameters are then used in processing a second workpiece, which may be similarly measured, and the results used to further refine the parameters.
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McHugh Paul R.
Ritzdorf Thomas L.
Weaver Robert A.
Wilson Gregory J.
Perkins Coie LLP
Semitool Inc.
Wilkins, III Harry D.
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